Topics Covered

Introduction to Thin Film Technology. Vacuum systems. Kinetic theory of gases. The physics and chemistry of evaporation/deposition mechanism. Physical vapor deposition and related techniques. Theories of epitaxy and nucleation, molecular beam epitaxy. Chemical vapor deposition techniques: reaction types, growth kinetics. Liquid phase epitaxy and related techniques. Theories of plasma and discharges. Sputtering  (DC, RF and ECR). Solution based deposition techniques (Sol-gel), spray pyrolysis.