Topics Covered

Nanosystems and Devices:  Introduction-  nanomaterials, nanodevices, nanostructures. Nanoscale Lithography: X-ray, Electron-Beam and Ion-Beam; Soft Lithography; Scanning Probe Lithography. Advances in Device Technology: nanoscale silicon devices, process technology, present challenges. Self Assembled Nanocrystals: self assembly, surface defects and passivation, structures, energy levels, transitions, luminescence and lasing. Nano Electro Mechanical Systems (NEMS): stress in thin films, mechanical to electrical transduction, surface  engineering techniques, process flow, NEMS actuators, high aspect ratio system technology. Nano Biotechnology: scope and dimensions; detection of biological species on electrical, mechanical and optical criteria; Bio functionality on silicon; Biochip sensors and systems- structures, process technology.