Topics Covered

Overview of semiconductor technology. Structural characterization: X-ray diffraction (XRD), low energy electron diffraction (LEED), reflection high energy electron diffraction (RHEED), atomic force microscopy (AFM), scanning tunneling microscopy (STM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), Rutherford backscattering spectroscopy (RBS), energy dispersive x-ray analysis (EDX), Auger electron spectroscopy (AES), electron energy loss spectroscopy (EELS), secondary ion mass spectroscopy (SIMS), X-ray photoelectron spectroscopy (XPS), elastic recoil detection (ERD). Electrical characterization: resistivity measurements, Hall measurement, current-voltage (I-V), capacitance-voltage (C-V), deep level transient spectroscopy (DLTS),  lifetime measurements. Optical characterization: optical transmittance and reflectance spectroscopy, ellipsometry, photoluminescence (PL), Raman spectroscopy, Fourier transform infrared spectroscopy.